Einsle, J. F., Bouillard, J. S., Dickson, W., & Zayats, A. V. (2011). Hybrid FIB milling strategy for the fabrication of plasmonic nanostructures on semiconductor substrates. Nanoscale Research Letters, 6(1), Article 572. https://doi.org/10.1186/1556-276X-6-572