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Nanotrench for nano and microparticle electrical interconnects (2010)
Journal Article
Dayen, J., Faramarzi, V., Pauly, M., Kemp, N. T., Barbero, M., Pichon, B. P., …Doudin, B. (2010). Nanotrench for nano and microparticle electrical interconnects. Nanotechnology, 21(33), Article 335303. https://doi.org/10.1088/0957-4484/21/33/335303

We present a simple and versatile patterning procedure for the reliable and reproducible fabrication of high aspect ratio (10 4 ) electrical interconnects that have separation distances down to 20 nm and lengths of several hundreds of microns. The pr... Read More about Nanotrench for nano and microparticle electrical interconnects.