An investigation into the effect of process parameters on carbon film physical properties produced by different deposition techniques
(1994)
Thesis
Dehbi-Alaoui, A. (1994). An investigation into the effect of process parameters on carbon film physical properties produced by different deposition techniques. (Thesis). University of Hull. Retrieved from https://hull-repository.worktribe.com/output/4215388
This thesis reports research to investigate the effect of process parameters on the physical properties of carbon films produced using different deposition techniques. The deposition techniques utilised are a FAB source, an r.f./d.c. EBPVD system and... Read More about An investigation into the effect of process parameters on carbon film physical properties produced by different deposition techniques.