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Displacement encoder using sine micro-window grating

Wang, Chunhai; Zhang, Guoxiong; Guo, Shangqi; Ma, Xinhui


Chunhai Wang

Guoxiong Zhang

Shangqi Guo


A novel displacement encoder, employing a sine micro-window grating and featuring high quality signals free from harmonic errors, was developed. The sine micro-window grating is a special component composed of arrays of micro-elements with a sine window at the center of each element. The prototype was successfully manufactured by employing optical pattern generator and lithography technology and has been used in the design of an optical encoder. Experimental results on it showed that the harmonics error in the encoder signals can be reduced to less than 2% of the fundamental wave.

Journal Article Type Article
Publication Date Aug 2, 1999
Journal Acta Optica Sinica
Print ISSN 0253-2239
Electronic ISSN 0253-2239
Publisher China Association for Science and Technology
Peer Reviewed Peer Reviewed
Volume 19
Issue 9
Pages 1153-1157
APA6 Citation Wang, C., Ma, X., Zhang, G., & Guo, S. (1999). Displacement encoder using sine micro-window grating. Acta Optica Sinica, 19(9), 1153-1157
Keywords Distance measurement; Optical sensors; Displacement encoder; Harmonics; Sine micro window grating;Diffraction gratings
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