Nanoparticles-based flash-like nonvolatile memories: Cluster beam synthesis of metallic nanoparticles and challenges for the overlying control oxide layer

Verrelli, E.; Tsoukalas, D.

Abstract

Nanoparticles (NPs) are of great scientific interest as they are effectively a bridge between bulk materials and atomic or molecular structures. In this work the focus is to present results concerning the use of NPs deposited using a novel room temperature cluster beam technique and show their applications in an emerging non-volatile memory (NVM) technology which represents an evolution of the standard floating gate NVM (which is the building block of the Flash architecture) and consists in the replacement of the floating gate with a NP layer. This work, except presenting new results, provides also a review and in depth insight into the main results obtained by the authors in the last decade.

Citation

Verrelli, E., & Tsoukalas, D. (2017). Nanoparticles-based flash-like nonvolatile memories: Cluster beam synthesis of metallic nanoparticles and challenges for the overlying control oxide layer. In P. Dimitrakis (Ed.), Charge-Trapping Non-Volatile Memories (157-210). Springer. https://doi.org/10.1007/978-3-319-48705-2_5

• Online Publication Date: Feb 16, 2017
• Publication Date: Feb 14, 2017
• Deposit Date: Apr 1, 2022
• Publisher: Springer
• Volume: 2
• Pages: 157-210
• Book Title: Charge-Trapping Non-Volatile Memories
• ISBN: 9783319487038 ; 9783319839998
• DOI: https://doi.org/10.1007/978-3-319-48705-2_5
• Public URL: https://hull-repository.worktribe.com/output/700979