Optical nanolithography using a scanning near-field probe with an integrated light source
(2008)
Journal Article
Kingsley, J. W., Ray, S. K., Adawi, A. M., Leggett, G. J., & Lidzey, D. G. (2008). Optical nanolithography using a scanning near-field probe with an integrated light source. Applied physics letters, 93(21), Article 213103. https://doi.org/10.1063/1.3032912
An ultracompact near-field optical probe is described that is based on a single, integrated assembly consisting of a gallium nitride (GaN) light-emitting diode (LED), a microlens, and a cantilever assembly containing a hollow pyramidal probe with a s... Read More about Optical nanolithography using a scanning near-field probe with an integrated light source.