Nanotrench for nano and microparticle electrical interconnects
(2010)
Journal Article
Dayen, J.-F., Faramarzi, V., Pauly, M., Kemp, N. T., Barbero, M., Pichon, B. P., …Doudin, B. (2010). Nanotrench for nano and microparticle electrical interconnects. Nanotechnology, 21(33), Article 335303. https://doi.org/10.1088/0957-4484/21/33/335303
We present a simple and versatile patterning procedure for the reliable and reproducible fabrication of high aspect ratio (10 4 ) electrical interconnects that have separation distances down to 20 nm and lengths of several hundreds of microns. The pr... Read More about Nanotrench for nano and microparticle electrical interconnects.